Two-dimensional process simulation using verified phenomenological models
نویسندگان
چکیده
منابع مشابه
Two-dimensional process simulation using verified phenomenological models
Two-dimensional (2-D) effects are becoming increasingly important in the diffusion of impurities in submicrometer silicon devices. Existing process simulators cannot accurately model some of these effects. We describe a 2-D process simulator PREDICT2 that handles implant damage effects, annealing, and lateral diffusion. PREDICT2 simulates the diffusion of impurities in silicon by using phenomen...
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ژورنال
عنوان ژورنال: IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems
سال: 1991
ISSN: 0278-0070
DOI: 10.1109/43.79501